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Department
"MICRO- AND ACOUSTOELECTRONICS"
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Head: Prof. E. Atanassova, D.Sc.
E-mail: elenada@issp.bas.bg
Phone: (+359 2) 9795 742 |
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The department performs fundamental and application oriented research in the following areas:
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- Thin and ultrathin dielectric films (including high-k dielectrics), and semiconductor films for nanoscale integrated circuits: logic (MOSFETs), dynamic memories (DRAMs) and nonvolatile memories (NVMs))
- Solid-state microsensors based on Silicon microelectronics
- New materials, technologies as well as piezoresonance structures for sensors and biocomposite applications
- Applications of surface transverse waves (STW), Rayleigh surface acoustic waves (RSAW) and bulk acoustic waves (BAW) in low-noise microwave oscillators, communications and sensor systems
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