Head:  Prof. E. Atanassova, D.Sc.

Phone: (+359 2) 9795 742

 The department performs fundamental and application oriented research in the following areas: 
  • Thin and ultrathin dielectric films (including high-k dielectrics), and semiconductor films for nanoscale integrated circuits: logic (MOSFETs), dynamic memories (DRAMs) and nonvolatile memories (NVMs))

  • Solid-state microsensors based on Silicon microelectronics

  • New materials, technologies as well as piezoresonance structures for sensors and biocomposite applications

  • Applications of surface transverse waves (STW), Rayleigh surface acoustic waves (RSAW) and bulk acoustic waves (BAW) in low-noise microwave oscillators, communications and sensor systems